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Flow Meter
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MFC(Mass
Flow Controller) ¼±Á¤ °¡À̵å |
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¼¾¼ ¹ß¿ºÎ°¡ °¡½º¿Í
ºñÁ¢ÃËÇϱ⠶§¹®¿¡ °¡¿¬¼º
°¡½ºÀÇ À¯·®Á¦¾î°¡ °¡´É.
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°¡½ºÀÇ Á¾·ù, sealing
ÀçÁú, À¯·®, Flow control
Indicator ³»ÀåÇüµî ´Ù¾çÇÏ°Ô
¼±ÅÃ.
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°¡½º Á¢Ã˺θ¦ ³»ºÎ½Ä¼ºÀÌ
°ÇÑ Stainless steelÀ»
»ç¿ë.
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Option¿¡ ÀÇÇØ Software¿¡
ÀÇÇÑ µ¥ÀÌÅͺм®, °ü¸®°¡
°¡´É.
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Low cost, ºü¸¥ ³³±â,
½Å¼ÓÇÑ A/S·Î °í°´ÀÇ
Á¦Ç° °æÀï·Â È®º¸.
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±¸
ºÐ |
Flow
range
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Accuracy
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Ư¡
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Catalogue
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5100
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1SCCM~20SLM
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FS
±1%À̳»
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High-grade, Metal seal, Diaphragm valve ¹æ½Ä
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pdf
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3200 |
1SCCM~20SLM
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FS
±1%À̳» |
High-grade, Diaphragm valve ¹æ½Ä |
pdf
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5400 |
10SCCM~20SLM
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FS
±1%À̳» |
High-grade, Metal seal, Diaphragm valve ¹æ½Ä |
pdf
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3660 |
10SCCM~20SLM
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FS
±1.0%À̳»
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Standard grade, Poppet valve ¹æ½Ä |
pdf
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9100 |
0.5 / 1 / 2SLM
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FS
±1%À̳» |
Auto pressure control, Diaphragm valve ¹æ½Ä
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pdf
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3665 |
30SLM~100SLM
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FS
±2%À̳» |
Standard grade, Poppet valve ¹æ½Ä |
pdf
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HFC-303 |
100SLM~1000SLM
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FS
±1%À̳» |
Solenoid + °ø¾Ð 2´Ü ¹ëºê, ´ëÀ¯·® Á¦¾î°¡´É
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pdf
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FLOW COMPO
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1SCCM~50SLM
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FS
±1%À̳» |
Indicator Set ÀÏüÇü, ÈÞ´ëÇü, 3660/3200 ³»Àå
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pdf
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FLOW COMP Jr
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10SCCM~20SLM
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FS
±1.5%À̳» |
Indicator Set ÀÏüÇü, ÈÞ´ëÇü, 8300 ³»Àå |
pdf
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8300
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10SCCM~20SLM
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FS
±1.5%À̳» |
Read-out Indicator ³»ÀåÇü
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pdf
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8350
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30SLM~100SLM
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FS
±1.5%À̳»
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Read-out Indicator ³»ÀåÇü
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pdf
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D8300 |
10SCCM~20SLM |
FS
±1%À̳» |
Digital
type, Control Indicator ³»ÀåÇü,
Elastomer seal |
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D3660 |
10SCCM~20SLM |
FS
±1%À̳» |
Digital
type, 3660 Base, ÀÀ´ä¼Óµµ Á¤¹Ðµµ
¿ì¼ö |
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CR-300
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Read-out Unit
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Digital control unit
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pdf
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[5100 / 5400] |
[3200] |
[3660 / 3665] |
[9100] |
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[HFC - 303] |
[FLOW COMP] |
[8300 / 8350] |
[CR - 300] |
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MFM(Mass
Flow Meter)¼±Á¤ °¡À̵å |
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°¡½º/¾×üÀÇ Á¾·ù, sealing
ÀçÁú, À¯·®, ¾Ð·Â, Flow
Indicator ³»ÀåÇüµî ´Ù¾çÇÏ°Ô
¼±ÅÃ.
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¾×ü¿ë MFM¿¡ ÀÇÇÑ °øÀå¿¡¼ÀÇ
³Ã°¢¼ö À¯·®°¨½Ã, Å×ÇÁ·Ð
ÀçÁúÀÇ MFM¿¡ ÀÇÇØ ¾à¾×,
Ãʼø¼ö¿Í °°Àº ³»ÈÇмºÀÌ
ÀÖ´Â À¯·®°¨½Ã¿¡µµ
´ëÀÀ.
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´ç»çÀÇ Needle valve¿Í
°áÇÕÇÏ¿© °£ÀÌÇü MFC°¡
°¡´É(Model 3810DS-V)
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Option¿¡ ÀÇÇØ Software¿¡
ÀÇÇÑ µ¥ÀÌÅͺм®, °ü¸®°¡
°¡´É.
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Low cost, ºü¸¥ ³³±â,
½Å¼ÓÇÑ A/S·Î °í°´ÀÇ
Á¦Ç° °æÀï·Â È®º¸.
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±¸
ºÐ |
Flow
range
|
Accuracy
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Ư ¡
|
Catalogue
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5410
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10SCCM ~ 20SLM
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FS
±1%À̳»
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High-grade, Metal seal
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pdf
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3100 |
1SCCM ~ 20SLM
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FS
±1%À̳» |
High-grade, Capillary flow sensor
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pdf
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3760 |
10SCCM ~ 20SLM
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FS
±1.5%À̳» |
Standard grade
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pdf
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3810S |
50SCCM ~ 50SLM
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FS
±0.5%À̳»
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Bypass capillary sensor, Best seller
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pdf
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3765 |
20SLM ~ 200SLM
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FS
±2%À̳»
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Standard grade
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pdf
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HFM-301 |
100SLM ~ 1000SLM
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FS
±1%À̳»
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´ëÀ¯·®, °í¾Ð¿ë(3.4MPa, ¿É¼Ç 6.8MPa)
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pdf
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HFM-200W |
1000SLM ~ 15000SLM
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FS
±1~5%À̳»
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´ëÀ¯·®, °í¾Ð¿ë(3.4MPa)
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pdf
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3810DS |
10SCCM ~ 100SLM
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FS
±2%À̳» |
Digital Indicator ³»Àå, 3810 base
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pdf
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8300MM
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10SCCM ~ 100SLM
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FS
±2%À̳»
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Digital Indicator ³»Àå, Àû»ê±â´É ³»Àå
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pdf
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8350MM
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20SLM ~ 150SLM
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FS
±2%À̳»
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Digital Indicator ³»Àå, Àû»ê±â´É ³»Àå
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pdf
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FM01 type
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0.5L/min ~ 150L/min
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FS
±3%À̳»
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¾×ü¿ë, ³Ã°¢¼öÀ¯·®°¨½Ã¿ë, PPS ÀçÁú
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pdf
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FM03 type
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0.4L/min ~ 100L/min
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FS
±3%À̳»
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¾×ü¿ë, Ãʼø¼ö, ¾à¾×¿ë, TEFLON ÀçÁú
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pdf
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VISION 2000
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0.5L/min ~ 35L/min
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FS ±1.5%À̳»
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°¢Á¾ ¾×ü¿ë, ¼ÒÇü, Àú°¡°Ý
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pdf
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Indicator
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Digital type
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pdf
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[ 5410] |
[3100] |
[3760 / 3765] |
[3810S] |
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[HFM-301] |
[HFM-200W] |
[3810DS] |
[8300 / 8350 MM] |
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[FM01] |
[FM03] |
[VISION-2000] |
[CR -200] |
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