Flow Meter

 

Flow Meter 

Ozone Gas Generator

Multi Flow Meter

Ozonized Water System  

 Lead Switch Flow Meter (°æº¸ Switch¿ë À¯·®°è)

Gas Mixer & Blender

 Liquid for Flow Digital controller (¾×ü¿ë µðÁöÅÐ À¯·®°è)

Fuel Cell (¿¬·áÀüÁö½ÃÇèÀåÄ¡)

Oxygen Gas Generator  

Ã˸ŽÃÇèÀåÄ¡

Nitrogen Gas Generator

Flow Control valve (À¯·®Á¦¾î ¹ëºê)

Mass Flow Controller

Pressure regulating valve (¾Ð·ÂÁ¦¾î¹ëºê)

 

 

MFC(Mass Flow Controller) ¼±Á¤ °¡À̵å

¼¾¼­ ¹ß¿­ºÎ°¡ °¡½º¿Í ºñÁ¢ÃËÇϱ⠶§¹®¿¡ °¡¿¬¼º °¡½ºÀÇ À¯·®Á¦¾î°¡ °¡´É.

°¡½ºÀÇ Á¾·ù, sealing ÀçÁú, À¯·®, Flow control Indicator ³»ÀåÇüµî ´Ù¾çÇÏ°Ô ¼±ÅÃ.

°¡½º Á¢Ã˺θ¦ ³»ºÎ½Ä¼ºÀÌ °­ÇÑ Stainless steelÀ» »ç¿ë.

Option¿¡ ÀÇÇØ Software¿¡ ÀÇÇÑ µ¥ÀÌÅͺм®, °ü¸®°¡ °¡´É.

Low cost, ºü¸¥ ³³±â, ½Å¼ÓÇÑ A/S·Î °í°´ÀÇ Á¦Ç° °æÀï·Â È®º¸.

* Multi Gas & Multi range MFC(Mass Flow Controller) : DF-200

»ó¼¼º¸±â

pdf

* Liquid for Flow controller (¾×ü¿ë À¯·®Á¶Àý±â) : FCL-200

»ó¼¼º¸±â

pdf

±¸    ºÐ

Flow range
Accuracy
Ư¡
Catalogue

5100

1SCCM~20SLM
FS ±1%À̳»
High-grade, Metal seal, Diaphragm valve ¹æ½Ä
pdf
3200
1SCCM~20SLM
FS ±1%À̳»
High-grade, Diaphragm valve ¹æ½Ä
pdf
5400
10SCCM~20SLM
FS ±1%À̳»
High-grade, Metal seal, Diaphragm valve ¹æ½Ä
pdf
3660
10SCCM~20SLM
FS ±1.0%À̳»
Standard grade, Poppet valve ¹æ½Ä
pdf
9100
0.5 / 1 / 2SLM
FS ±1%À̳»
Auto pressure control, Diaphragm valve ¹æ½Ä
pdf
3665
30SLM~100SLM
FS ±2%À̳»
Standard grade, Poppet valve ¹æ½Ä
pdf
HFC-303
100SLM~1000SLM
FS ±1%À̳»
Solenoid + °ø¾Ð 2´Ü ¹ëºê, ´ëÀ¯·® Á¦¾î°¡´É
pdf
FLOW COMPO
1SCCM~50SLM
FS ±1%À̳»
Indicator Set ÀÏüÇü, ÈÞ´ëÇü, 3660/3200 ³»Àå
pdf
FLOW COMP Jr
10SCCM~20SLM
FS ±1.5%À̳»
Indicator Set ÀÏüÇü, ÈÞ´ëÇü, 8300 ³»Àå
pdf
8300
10SCCM~20SLM
FS ±1.5%À̳»
Read-out Indicator ³»ÀåÇü
pdf
8350
30SLM~100SLM
FS ±1.5%À̳»
Read-out Indicator ³»ÀåÇü
pdf
D8300
10SCCM~20SLM
FS ±1%À̳»
Digital type, Control Indicator ³»ÀåÇü, Elastomer seal

 

D3660
10SCCM~20SLM
FS ±1%À̳»
Digital type, 3660 Base, ÀÀ´ä¼Óµµ Á¤¹Ðµµ ¿ì¼ö

 

CR-300
Read-out Unit
 
Digital control unit
pdf
 

[5100 / 5400]

[3200]

[3660 / 3665]

[9100]

[HFC - 303]

[FLOW COMP]

[8300 / 8350]

[CR - 300]

 
MFM(Mass Flow Meter)¼±Á¤ °¡À̵å

°¡½º/¾×üÀÇ Á¾·ù, sealing ÀçÁú, À¯·®, ¾Ð·Â, Flow Indicator ³»ÀåÇüµî ´Ù¾çÇÏ°Ô ¼±ÅÃ.

¾×ü¿ë MFM¿¡ ÀÇÇÑ °øÀå¿¡¼­ÀÇ ³Ã°¢¼ö À¯·®°¨½Ã, Å×ÇÁ·Ð ÀçÁúÀÇ MFM¿¡ ÀÇÇØ ¾à¾×, Ãʼø¼ö¿Í °°Àº ³»È­ÇмºÀÌ ÀÖ´Â
    À¯·®°¨½Ã¿¡µµ ´ëÀÀ.

´ç»çÀÇ Needle valve¿Í °áÇÕÇÏ¿© °£ÀÌÇü MFC°¡ °¡´É(Model 3810DS-V)

Option¿¡ ÀÇÇØ Software¿¡ ÀÇÇÑ µ¥ÀÌÅͺм®, °ü¸®°¡ °¡´É.

Low cost, ºü¸¥ ³³±â, ½Å¼ÓÇÑ A/S·Î °í°´ÀÇ Á¦Ç° °æÀï·Â È®º¸.

* Liquid for Digital Flow Meter (¾×ü¿ë µðÁöÅÐ ÃÊÀ½ÆÄ À¯·®°è) : FML-500

»ó¼¼º¸±â

pdf

±¸    ºÐ

Flow range
Accuracy
Ư ¡
Catalogue

5410

10SCCM ~ 20SLM
FS ±1%À̳»
High-grade, Metal seal
pdf
3100
1SCCM ~ 20SLM
FS ±1%À̳»
High-grade, Capillary flow sensor
pdf
3760
10SCCM ~ 20SLM
FS ±1.5%À̳»
Standard grade
pdf
3810S
50SCCM ~ 50SLM
FS ±0.5%À̳»
Bypass capillary sensor, Best seller
pdf
3765
20SLM ~ 200SLM
FS ±2%À̳»
Standard grade
pdf
HFM-301
100SLM ~ 1000SLM
FS ±1%À̳»
´ëÀ¯·®, °í¾Ð¿ë(3.4MPa, ¿É¼Ç 6.8MPa)
pdf
HFM-200W
1000SLM ~ 15000SLM
FS ±1~5%À̳»
´ëÀ¯·®, °í¾Ð¿ë(3.4MPa)
pdf
3810DS
10SCCM ~ 100SLM
FS ±2%À̳»
Digital Indicator ³»Àå, 3810 base
pdf
8300MM
10SCCM ~ 100SLM
FS ±2%À̳»
Digital Indicator ³»Àå, Àû»ê±â´É ³»Àå
pdf
8350MM
20SLM ~ 150SLM
FS ±2%À̳»
Digital Indicator ³»Àå, Àû»ê±â´É ³»Àå
pdf
FM01 type
0.5L/min ~ 150L/min
FS ±3%À̳»
¾×ü¿ë, ³Ã°¢¼öÀ¯·®°¨½Ã¿ë, PPS ÀçÁú
pdf
FM03 type
0.4L/min ~ 100L/min
FS ±3%À̳»
¾×ü¿ë, Ãʼø¼ö, ¾à¾×¿ë, TEFLON ÀçÁú
pdf
VISION 2000
0.5L/min ~ 35L/min
FS ±1.5%À̳»
°¢Á¾ ¾×ü¿ë, ¼ÒÇü, Àú°¡°Ý
pdf
Indicator


Digital type
pdf
 

[ 5410]

[3100]

[3760 / 3765]

[3810S]

[HFM-301]

[HFM-200W]

[3810DS]

[8300 / 8350 MM]

[FM01]

[FM03]

[VISION-2000]

[CR -200]