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Thermal
Mass Flow Controller Á¦¾î |
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Air,
N2, O2, He, H2, Ar, CO2, ±âŸ °¡½ºµµ Á¦¾î °¡´É |
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49
~ 343 kPa (0.5 ~ 3.5kg/cm2.G) |
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SUS316, VITON, TEFLON |
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3½-Digit
7 segment LED Digital Meter |
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4-Digit
Digital switch¿¡ ÀÇÇÑ °¢¼ººÐ µ¶¸³ ¼³Á¤ |
Shut
Off Valve
|
°¢
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IN
Side Joint
|
20¥ìÇ¥ÁØ
Àú¾ÐÀÇ °æ¿ì SUS316 Filter ºÎÂø, Filter°¡ ¾ø¾îµµ °¡´É |