Spin Coater
Lux Meter(Á¶µµ°è)
On-Line Analyzer
O2 & CO2 Gas Analyzer (¹ßÈ¿¿ë O2, CO2 ÃøÁ¤±â)
Quick Thermal Conductivity Meter (¿ Àüµµµµ ÃøÁ¤±â)
Density Specific Gravity Meter (¹Ðµµ ºñÁß ÃøÁ¤±â)
Air Purifier and Sterilizer (°ø±â Á¤È ¼¼±Õ¸ê±Õ±â)
Heat Flow Meter (¿ È帧 ÃøÁ¤±â)
Specific Conductivity Meter (¾× Àü±â Àüµµµµ ÃøÁ¤±â)
TOC Analyzer (Liquid Sample)
Karl/Fischer Moisture Titrator (K/F ¼öºÐ ÀûÁ¤±â)
Thermal Analyzer (¿ ¹°¼º ÃøÁ¤ÀåÄ¡)
TOC & TN (Total Nitrogen) Analyzer
Automatic Potentiometric Titrator (ÀÚµ¿ ÀüÀ§Â÷ ÀûÁ¤±â)
¹«¼ÒÀ½, Àú¼ÒÀ½ ÄÞÇ»·¹¼Å
Robotic Analyzers (Automation for BOD, COD, pH, EC, Turbidity, ISE, Titrations /ÀüÀÚµ¿ ¼öÁú Á¾ÇÕ ºÐ¼®±â)
Automated Wet Chemistry Analyzer (ÀüÀÚµ¿ ½À½Ä ÈÇÐ ºÐ¼®±â)
Mini Oilless Compressor (¼ÒÇü ÄÞÇ»·¹¼Å)
Compact Color Meter(ÈÞ´ë¿ë ºñ»ö°è)
Automatic Bio sampler
DC Compressor
Mercury(Hg) Analyzer(¼öÀººÐ¼®±â)
TOC Analyzer (Liquid & Solid Sample)
Cleaning Machinert (°í¾Ð¼¼Ã´±â)
Green Leaf Area Meter(³ì¿±¸éÀûÃøÁ¤±â)
TN & Protein Analyzer
Gross Meter(¼±¸íµµÃøÁ¤±â)
Fluorescence Analyzer
[ SPIN 1200 ]
[ SPIN 1200D ]
[ SPIN 3000 ]
MODEL
SPIN 1200
SPIN 1200D
SPIN 3000
SPIN 3000A
Substrate Size
Piece ~ 4" wafer
Piece ~ 6" wafer
Piece ~ 8" wafer
Chuck speed (rpm)
300 ~ 7000rpm
100 ~ 8000rpm
Motor
DC Motor
DC Servo Motor
AC Servo Motor
Spin state (Program)
2 Step control
50Step, 20Recipe, Digital program control
Timer
1 ~ 999 sec, Variable
Bowl size
8 "
12 "
Bowl ÀçÁú
Al, Acetal, Teflon, PP µî
Vacuum chuck
anodzed Al, Acetal, Teflon, PP µî
Dimension (mm)
230 x 340 x 160 (W x D x H)
390 x 570 x 280 (W x D x H)
Electric Power
220V, 60Hz, 5A
Built in OillessVacuum Pump
- Max Vacuum : 650mmHg - Vacuum speed : 20L/min - Motor : 1/8HP