Spin Coater

Lux Meter(Á¶µµ°è)

On-Line Analyzer

O2 & CO2 Gas Analyzer (¹ßÈ¿¿ë O2, CO2 ÃøÁ¤±â)

Quick Thermal Conductivity Meter (¿­ Àüµµµµ ÃøÁ¤±â)

Density Specific Gravity Meter (¹Ðµµ ºñÁß ÃøÁ¤±â)

Air Purifier and Sterilizer (°ø±â Á¤È­ ¼¼±Õ¸ê±Õ±â)

Heat Flow Meter (¿­ È帧 ÃøÁ¤±â)

Specific Conductivity Meter  (¾× Àü±â Àüµµµµ ÃøÁ¤±â)

TOC Analyzer (Liquid Sample)

Karl/Fischer Moisture Titrator (K/F ¼öºÐ ÀûÁ¤±â)

Thermal Analyzer (¿­ ¹°¼º ÃøÁ¤ÀåÄ¡)

TOC & TN (Total Nitrogen) Analyzer

Automatic Potentiometric Titrator (ÀÚµ¿ ÀüÀ§Â÷ ÀûÁ¤±â)

¹«¼ÒÀ½, Àú¼ÒÀ½ ÄÞÇ»·¹¼Å

Robotic Analyzers (Automation for BOD, COD, pH, EC, Turbidity, ISE, Titrations /ÀüÀÚµ¿ ¼öÁú Á¾ÇÕ ºÐ¼®±â)

Automated Wet Chemistry Analyzer
   (ÀüÀÚµ¿ ½À½Ä È­ÇÐ ºÐ¼®±â)

Mini Oilless Compressor (¼ÒÇü ÄÞÇ»·¹¼Å)

Compact Color Meter(ÈÞ´ë¿ë ºñ»ö°è)

 Automatic Bio sampler

DC Compressor

Mercury(Hg) Analyzer(¼öÀººÐ¼®±â)

TOC Analyzer (Liquid & Solid Sample)

Cleaning Machinert (°í¾Ð¼¼Ã´±â)

Green Leaf Area Meter(³ì¿±¸éÀûÃøÁ¤±â)

TN & Protein Analyzer

 

Gross Meter(¼±¸íµµÃøÁ¤±â)

Fluorescence Analyzer

 

 

 
Spin Coater
 
- Microprocessor control.
- Program control °¡´É.
- Wafer Å©±â(Piece ~ 4¡°, 6¡±, 8¡°)¿¡ µû¶ó ±âÁ¾ ¼±Á¤.
- ±âÁ¸¿¡ ¿Ü»ê°ú ºñ±³ÇØ °£ÆíÇÑ Á¶ÀÛ, ¿ì¼öÇÑ Ç°Áú, °æÁ¦ÀûÀÎ °¡°Ý´ë ½ÇÇö.
 

[ SPIN 1200 ]

[ SPIN 1200D ]

[ SPIN 3000 ]

 

Specification

 

MODEL

SPIN 1200

 SPIN 1200D

 SPIN 3000

 SPIN 3000A

Substrate Size

 Piece ~ 4" wafer

Piece ~ 4" wafer 

 Piece ~ 6" wafer

Piece ~ 8" wafer 

Chuck speed (rpm) 

300 ~ 7000rpm

100 ~ 8000rpm

100 ~ 8000rpm

100 ~ 8000rpm

 Motor

DC Motor

 DC Servo Motor

 DC Servo Motor

AC Servo Motor 

 Spin state (Program)

 2 Step control

50Step, 20Recipe, Digital program control

 Timer

1 ~ 999 sec, Variable

 Bowl size

8 "

 8 "

12 "

12 "

 Bowl ÀçÁú

Al, Acetal, Teflon, PP µî

Vacuum chuck 

 anodzed Al, Acetal, Teflon, PP µî

Dimension (mm) 

230 x 340 x 160 (W x D x H)

390 x 570 x 280 (W x D x H) 

Electric Power 

220V, 60Hz, 5A

 Built in Oilless
Vacuum Pump

 - Max Vacuum : 650mmHg
 - Vacuum speed : 20L/min
 - Motor : 1/8HP