Á÷°áÇü Oil Áø°øÆßÇÁ(G, GLD, GCD series) Diaphram Dry Vacuum Pump(DA series, DTC series)

 

Á÷°áÇü Oil Áø°øÆßÇÁ(G, GLD, GCD series)  

Diaphram Dry Vacuum Pump(DA series, DTC series) 

Potable Aspirator (MDA-015, MDA-050, MDA-020C)

 Accessories(Oil mist Trap, Vacuum Oil)

Áø°øÁõÂøÀåÄ¡(Vacuum Coater)

 ½ºÆÄÅ͸µ ÀåÄ¡(Sputtering System)

 Áø°ø¹è±âÀåÄ¡(High Vacuum Pumping System, Diffusion pump & Turbo punp system)

 ½ºÄÚ·Ñ °Ç½Ä Áø°øÆßÇÁ(Scroll Dry Vacuum Pump)

 Áø°ø°ÔÀÌÁö (Vacuum Gauge)

 Çï·ý ¸®Å© µðÅØÅÍ (Helium Leak Detector)

 

 

Áø°ø¹è±âÀåÄ¡(High Vacuum Pumping System, Diffusion pump & Turbo punp system)
 

- Pipe flameÀ¸·Î ÇÊ¿ä±â±â¸¦ CompactÇÏ°Ô ¼ö³³ÇÏ¿©, Ãë±Þ°ú º¸°ü, À̵¿ÀÌ ¿ëÀÌ

  - Áøµ¿ÀÌ °ÅÀÇ ¾ø´Ù.
  - Option¿¡ ÀÇÇÏ¿© Áø°ø ÁõÂø±â±â·Î¼­ »ç¿ë °¡´ÉÇÏ´Ù.

VPC-050 / 050A
VPC-250F / 250FA
VPC-400
LN Cold Trap
 

 Model

VPC-050

VPC-050A

VPC-250F

VPC-250FA

VPC-400

µµ´Þ ¾Ð·Â
(¾×üÁú¼Ò »ç¿ë½Ã)

5.3x10-6torr
(1.1x10-6torr)

7.5x10-7torr
(7.5x10-8torr)

7.5x10-7torr
(7.5x10-8torr)

Pumping
Speed

Diffusion pump

50 L/sec (DPF-050)

200 L/sec (DPF-200)

400 L/sec

Rotary pump

20 L/min (G-20DA)

100 L/min (G-100D)

200 L/min(GLD-201A)

Main Valve

25A Butterfly Valve

65A Clapper Valve

105A Clapper Valve

3-way Valve

10A 3-way Valve

20A 3-way Valve

20A 3-way Valve

³Ã°¢ ¹æ½Ä

°ø³Ã½Ä

°ø³Ã½Ä

¼ö³Ã½Ä

LN Cold Trap

Option

Option

Option

Àü ¿ø

1¥õ/100V/0.6Kw

1¥õ/100V/1.35Kw

3¥õ/200V/1.35Kw

Áß ·®

16kg

22kg

50kg

55kg

63kg

Å© ±â(WxDxH)

346 x 316 x 361mm

530 x 480 x 735mm

530x480x780mm

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Ź»óÇü

Ź»ó ÀÚµ¿Çü

Ç¥ÁØÇü

Ç¥ÁØ ÀÚµ¿Çü

°í¼ÓÇü

- Åͺ¸ºÐÀÚÆßÇÁ Á¶ÇÕÇü(High Vacuum Pumping System with Turbo-molecular pump)

 

Dry type VPT-030

VPT-050

 

 Model

VPT-030

VPT-050

µµ´Þ ¾Ð·Â

10-4Pa (7.5x10-7torr)

1.3x10-4Pa (9.8x10-7torr)

Turbo Pumping Speed

25 L/sec

50 L/sec

Back Pump

Diaphragm pump 7L/min

Oil rotary pump 50L/min (GVD-050A)

Warming time

1 min

-

³Ã°¢ ¹æ½Ä

°ø³Ã½Ä

°ø³Ã½Ä

Suction Port

KF-40

VG65

Àü ¿ø

1¥õ/100V/0.46Kw

1¥õ/100V/0.75Kw

Áß ·®

16kg

45kg

Å© ±â(WxDxH)

254 x 319 x 300mm

325 x 480 x 700mm

Pumping system

-

 - Main gate valve 65A(AlÁ¦)
 - Manifold SUSÁ¦
 - Leak¿ë ¹ëºê(Gas µµÀÔ¿ë 1°³)

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Oilless typeÀÇ CleaningÇÑ Dry
typeÀ¸·Î OilÀÇ ¿ª·ù°ÆÁ¤ÀÌ ¾øÀ½