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Á÷°áÇü Oil Áø°øÆßÇÁ(G, GLD, GCD series) Diaphram Dry Vacuum Pump(DA series, DTC series)
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Áø°ø¹è±âÀåÄ¡(High Vacuum Pumping System, Diffusion pump & Turbo punp system) |
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- Pipe flameÀ¸·Î ÇÊ¿ä±â±â¸¦ CompactÇÏ°Ô ¼ö³³ÇÏ¿©, Ãë±Þ°ú º¸°ü, À̵¿ÀÌ ¿ëÀÌ
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- Áøµ¿ÀÌ °ÅÀÇ ¾ø´Ù. |
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- Option¿¡ ÀÇÇÏ¿© Áø°ø ÁõÂø±â±â·Î¼ »ç¿ë °¡´ÉÇÏ´Ù. |
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VPC-050 / 050A |
VPC-250F / 250FA |
VPC-400 |
LN Cold Trap |
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Model |
VPC-050 |
VPC-050A |
VPC-250F |
VPC-250FA |
VPC-400 |
µµ´Þ ¾Ð·Â
(¾×üÁú¼Ò »ç¿ë½Ã) |
5.3x10-6torr
(1.1x10-6torr) |
7.5x10-7torr
(7.5x10-8torr) |
7.5x10-7torr
(7.5x10-8torr) |
Pumping
Speed |
Diffusion pump |
50 L/sec (DPF-050) |
200 L/sec (DPF-200) |
400 L/sec |
Rotary pump |
20 L/min (G-20DA) |
100 L/min (G-100D) |
200 L/min(GLD-201A) |
Main Valve |
25A Butterfly Valve |
65A Clapper Valve |
105A Clapper Valve |
3-way Valve |
10A 3-way Valve |
20A 3-way Valve |
20A 3-way Valve |
³Ã°¢ ¹æ½Ä |
°ø³Ã½Ä |
°ø³Ã½Ä |
¼ö³Ã½Ä |
LN Cold Trap |
Option |
Option |
Option |
Àü ¿ø |
1¥õ/100V/0.6Kw |
1¥õ/100V/1.35Kw |
3¥õ/200V/1.35Kw |
Áß ·® |
16kg |
22kg |
50kg |
55kg |
63kg |
Å© ±â(WxDxH) |
346 x 316 x 361mm |
530 x 480 x 735mm |
530x480x780mm |
Ư ¡ |
Ź»óÇü |
Ź»ó ÀÚµ¿Çü |
Ç¥ÁØÇü |
Ç¥ÁØ ÀÚµ¿Çü |
°í¼ÓÇü |
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- Åͺ¸ºÐÀÚÆßÇÁ Á¶ÇÕÇü(High Vacuum Pumping System with Turbo-molecular pump) |
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Model |
VPT-030 |
VPT-050 |
µµ´Þ ¾Ð·Â |
10-4Pa (7.5x10-7torr) |
1.3x10-4Pa (9.8x10-7torr) |
Turbo Pumping Speed |
25 L/sec |
50 L/sec |
Back Pump |
Diaphragm pump
7L/min |
Oil rotary pump
50L/min (GVD-050A) |
Warming time |
1 min |
- |
³Ã°¢ ¹æ½Ä |
°ø³Ã½Ä |
°ø³Ã½Ä |
Suction Port |
KF-40 |
VG65 |
Àü ¿ø |
1¥õ/100V/0.46Kw |
1¥õ/100V/0.75Kw |
Áß ·® |
16kg |
45kg |
Å© ±â(WxDxH) |
254 x 319 x 300mm |
325 x 480 x 700mm |
Pumping system |
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- Main gate valve 65A(AlÁ¦)
- Manifold SUSÁ¦
- Leak¿ë ¹ëºê(Gas µµÀÔ¿ë 1°³) |
Ư ¡ |
Oilless typeÀÇ CleaningÇÑ Dry
typeÀ¸·Î OilÀÇ ¿ª·ù°ÆÁ¤ÀÌ ¾øÀ½
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